日本金属学会誌
Online ISSN : 1880-6880
Print ISSN : 0021-4876
ISSN-L : 0021-4876
RFスパッタ法で作製したパラジウム薄膜中の水素の拡散係数
羽木 秀樹
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ジャーナル フリー

1989 年 53 巻 11 号 p. 1085-1088

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Diffusion coefficients of hydrogen in the palladium films of α-phase have been measured between 278 and 323 K by an electrochemical stripping method. Palladium films were deposited on iron by RF sputtering. The values of the diffusion coefficient of hydrogen obtained for the film specimens of 0.68 μm and 1.36 μm in thickness were about 2 orders of magnitude lower than those reported for the bulk specimens in the literature, and the temperature dependence of the diffusion coefficients of hydrogen was given by DH (m2/s)=4.16×10−9exp (−25.7 (kJ/mol)/RT).

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