論文
鏡面微細パターン形状を創成するレーザ微細加工
2009 年 75 巻 6 号 p. 762-767
詳細
2009 年 75 巻 6 号 p. 762-767
In this research, we proposed to achieve the mirror surface with a minute concave on the fused silica glass by a mew method. The surface enabled to control the curvature and the concave was sphere shaped. This method was to combine the laser machining and the chemical etching. The mechanism and the processing property of this method were verified from both experiments and simulations. As a result, we achieved to develop the better control of a micro shape and to create the mirror surface with a sphere shaped concave on the glass. The surface roughness was 2nmRa 11nmPV without chipping. In addition, processing multiple concaves changed the pattern of the surface to polygons such as square shapes and hexagonal shapes.
