露光装置の地震対策

—ソフトランディングによる装置保護—

抄録

In the field of ultra accurate positioning system, such as semiconductor lithograph machine, an active isolation system is generally used. Especially, it is an indispensable unit in the system which is required a highly accurate isolation performance from outside in the semiconductor exposure machine. Active isolation system is composed of VCM and air-spring, which is main part of supports. In the present time, there are many earthquakes in any other country of the world, of course including Japan, such as Sumatora (Indonesia), Sichuan (China), MidNiigata(Japan), and are many troubles in lithograph manufacturing process. The newest exposure machine is very much expensive, further more, device company have to establish countermeasure for BCP(Business Continuity Plan)and BCM(Business Continuity Management). Then exposure machine supplier have to establish the way to avoid extensive damage that requires a long term for recovery from the earthquake.
In this paper, the main body has soft landing by means of control air pressure in the air-spring, the machine is relieved from extensive damage of the earthquake. Therefore it is able to improve steady production by soft landing.