磁気浮上アクチュエータを用いた微細穴放電加工

抄録

This paper describes small-hole electrical discharge machining (EDM) with a high speed and high precision five degrees of freedom controlled maglev actuator. To machine deep small holes with a depth more than the positioning stroke of the maglev actuator, a conventional EDM machine having a long stroke and the maglev actuator were combined and cooperatively controlled. To avoid abnormal electrical discharge, we proposed two types of driving method for an electrode; jump and orbital motions using the maglev actuator. Experimental results show that high speed and high precision adjustment of the distance between a workpiece and the electrode by the maglev actuator is effective for high speed EDM. Moreover, the jump and orbital motions increase the machining speed due to improvement in the ejection of debris and bubbles.