抄録
Single layer graphene (SLG) is a two-dimensional carbon atom crystalline film. Its extraordinary physical properties, such as high electrical conductivity and high mechanical strength, have enabled rapid development of graphene-based transistors. Atomic force microscopy is a common tool used to determine the surface topography at a nanometer level and is applied to mechanical groove formation of SLG in our research. Since, the traditional scratch machining method was not proving to be very suitable in this regard, in this study, nanometer-scale vibration machining was carried out with a diamond-coated probe as a machining tool, and SLG on a SiO2 substrate was used as the workpiece. We find that the vibration machining method has higher machining precision than the traditional scratch machining method.
In addition, the vibration machining mechanism is also clearly discussed. By using the proposed vibration machining model focusing on energy, the precision of the machined groove can be predicted before machining. A qualitative comparison between theoretical value of proposed model and experiment value is provided.
