サーボ型ジャークセンサの改良およびその性能評価

抄録

This paper proposes the servo-type jerk sensor for horizontal direction. In the previous research, the servo-type jerk sensor for vertical direction has realized and applied to the anti-vibration apparatus. This paper shows the improvement of the jerk sensor performance by reexamining the servo mechanism. The authors show the desired parameters of the jerk sensor necessary to realize Butterworth filter characteristics and the parameter adjustment methods to realize the desired parameters. By applying the proposed parameter adjustment methods, the proposed jerk sensor achieves the following characteristics; wide range of frequency bandwidth and high sensitivity. The authors also show the feasibility of improving the sensitivity of the proposed jerk sensor by replacing the internal position sensor for the high sensitivity sensor, such as the LASER displacement sensor. Finally, two experimental results show the applicability of feedback controls for a linear slider system and a pneumatic stage system.