差動レーザオートコリメーションに関する研究 (第2報)

2本のレーザビームによる差動測定プローブ

抄録

In order to apply the laser autocollimation method to on-machine-measurement, a trial probe was made. The probe was constructed from two collimated beams of laser diodes and a PSD (position sensitive device) which was located in a focal plane of an objective. The resolution of the trial probe was 1 second from estimations of SN ratio. Its accuracy was estimated as 1 second from a curve fitting error in a range of 10 minutes. Thermal drift was about 0.2 second. In measurements of cross sectional profiles of flat and parabolic mirrors, translatory and angular errors during the scanning motion were canceled remarkably. Measured profiles of mirrors were reproduced with the maximum deviation of 0.05 micrometer under large residual vibration due to stepping motion of a scanning table.