1992 年 58 巻 10 号 p. 1735-1740
Micro-irregularities of machined surface are classified into three regions by means of power spectral density function. The first region is made of longer wave which is called waviness or form errors. The second shows fractal-like property and the third contains simple form asperities only. This report presents that these characteristics are shown more clearly by the power spectaral density function than the structure function. From these characteristics, this report recommends a cut-off value of low pass filter for waviness and an optimum sampling interval for digitiziing data.