電子線描画マイクログリッドによる切削加工ひずみの測定

抄録

This paper describes the influence of tool angles, especially rake angles, on the surface integrity of mirror cutting material. In this study, strain distribution in damaged layer is measured by a newly developed method. This method is applied electron beam lithography to drawing Au micro grids on the surface of oxygen free copper. Orthogonal cutting of specimen using various rake angle tools are carried out using a micro cutting device. It was found that strain distribution had close connection with tool geometry, and that highly compressed strain to vertical direction from machined surface was shown on the condition of negative rake angle tool. This method is effective to visualize cutting mechanism and material deformation at microscopic structure.