圧電素子を用いた高剛性多自由度微動機構 (第2報)

6自由度への拡張

抄録

The purpose of this study is to propose a new six-degree-of-freedom fine motion mechanism with high rigidity. It has the following characteristics : (1) the loading capacity of the fine motion stage is large; (2) this mechanism requires neither guide plane nor lubrication, and moves without any friction, wear and backlash; (3) each one-degree-of-freedom motion does not interfere with the others. In the previous report, fine motion mechanism which has five-degrees-of-freedom except the rotational direction around Z-axis was proposed. In this paper, the remaining one-degree-of-freedom fine motion mechanism or γ-stage is proposed. The construction and the experimental results were described for newly developed γ-stage. The maximum movement of the stage was 2 arcsec in γ-direction at 400N load. The positioning resolution was less than 0.02 arcsec in γ-direction. The positioning error and motion errors were less than ±0.01 μm and ±0.02 arcsec. Transient interference observed in the previous paper was decreased from 0.3 μm to 0.06 μm by employing velocity feedback system.