TiNi薄膜マイクロアクチュエータの電流加熱結晶化熱処理法
可逆型TiNi薄膜の場合の変形特性と組織分析
1997 年 63 巻 6 号 p. 844-848
詳細
1997 年 63 巻 6 号 p. 844-848
The several characteristics of TiNi thin films treated by the new method, direct Joule's heat crystallization treatment method, were compared with those treated by conventional heat treatment method in an electrical furnace. As the results, the followings were clarified for reversible TiNi thin films : (1) the crystal compositions of the TiNi thin films treated by the new method were same as those by the conventional method, (2) moreover, the TiNi thin films treated by the new method were deformed larger than those by the conventional method, and (3) the optimum heat treatment condition for producing larger deformable TiNi thin film is found as 600°C×1 minute. From these results, the new crystallization heat treatment method is very useful for TiNi thin film actuators.
