2002 年 68 巻 2 号 p. 284-290
High gain is necessary in order to realize high-speed feedback control of the linear motor. However, high gain setting is not generally possible as it causes resonance of the machine structure. In order to realize high gain while restraining resonance, a method has been devised with an observer, which includes a resonance model of the linear motor. The motion information of the linear motor moving element is used while disregarding vibration. The observer calculates motion of the center of gravity. Proposed method has been successfully experimented with an actual linear motor in that high gain feedback control and high speed positioning have been effectively demonstrated.