抄録
Ni-Zn-ferrite thin films were formed on glass substrate by a laser ablation method which uses KrF excimer laser of 248 nm wavelength at 15 Hz frequency. The substrate temperatures examined were room temperature, 200°C and 350°C. Thickness of deposited film was 2μm. Ni-Zn-ferrite films are of a spine1 structure when the substrate temperature is increased up to 200°C. Saturation magnetic flux densities of Ni-Zn-ferrite films which annealed at 400°C were 1300∼2020 gauss. The coercive force of annealed Ni-Zn-ferrite films decreased from 534 to 70∼113 Oe with decreasing N2O gas pressure from 1×10-2 Torr to 1×10-5 Torr.
