抄録
CoFe2O4 films were prepared on glass substrates by annealing sputtered Co/Fe multilayer films in the atmosphere. On sputtering, thickness of Co and Fe layers and the number of Co/Fe bilayer, N, were varied while the total thickness of the films was maintained at 2000Å. The oxide films have shown large coercive force of∼3kOe. and the maximum Kerr rotation of 0.8 deg (λ=825 nm) has been obtained at a Co : Fe ratio of 1 : 2 and at N=40. Perpendicular magnetic anisotropy has been achieved in the (400) oriented CoFe2O4 films, which have grown from the Fe (200) oriented multilayer films, as a result of appropriate control of Co concentration, N. substrate temperature, and background pressure. Auger electron spectroscopy (AES) depth analysis has revealed that the distribution of Co and Fe atoms is not uniform in the oxide films.
