抄録
The effects of heat treatment on soft magnetic properties and crystalline structure of Fe-Zr-N thin films made by RF magnetron sputtering were investigated. Results show that ultra fine grain structure and excellent softmagnetic properties with good thermal stability over 500°C were obtained by proper heat treatments. Thermal behaviors of uniaxial anisotropy induced by heat treatments in a DC magnetic field were also studied. Anisotropy field Hk showed rapid reversible relaxation in the first few minutes of the heat treatment in a field directed along the hard axis. On the other hand little variation was observed for Hk and permeability when they were heat treated without magnetic field.
