抄録
This paper presents the method for calculating the external self-inductance Le, the internal self-inductance Li and the mutual inductance M of a conductor in LSI packages, and the estimation of those methods.
A straight conductor with a cross-section of 5 × 60 μm is divided into between 48 and 19,200 straight segments. The inductances Le, Li, and M can be calculated by the electrical formulas, since all segments are in parallel. The accuracy of the calculation is about 0.2% at Le when the conductor is divided into 300 segments, and about 5.5% at Li when the conductor is divided into 19,200 segments.
Li is decreased from 132 to 36 pH by the skin effect when the frequency is increased from 0.1 to 1.9 GHz.
The inductance L, of a specimen with a micro-strip line is calculated and measured. The difference between the calculated and measured values is less than 17% in the frequency range from 1 to 10 MHz.
