Resonances of Radio Frequency Probe in a Plasma

抄録

An RF probe experiment was carried out with a low density plasma, the resonances of the probe impedance were studied. The resonances were observed in a frequency range between the sheath-plasma resonance and the plasma frequencies. The mechanism of these additional resonances is discussed. It is shown that a finite electron temperature will introduce these resonances in addition to the sheath-plasma resonance. Choosing some artificial density distributions in front of the probe, the frequency dependence of the resonances is explained qualitatively.