エクステンディド・アブストラクト
Current Activities of SC4 Depth Profiling in ISO/TC201 Surface Chemical Analysis
2009 年 15 巻 3 号 p. 243-245
詳細
2009 年 15 巻 3 号 p. 243-245
ISO / TC201 (Surface Chemical Analysis) / SC4 is the subcommittee to work for standardization in depth profiling. The standard drafts of ISO 14606, TR 15969, and TR 22335 have been published in order to achieve a good depth resolution, to estimate a sputtered depth, and to convert a sputtering time to the sputtered depth by a sputtering rate. ISO/TC201/SC4 is also working to prepare new work items on “ion beam alignment” and “utilization of standard multiple layers”.
