Experimental Determinations of Electron Inelastic Mean Free Paths in Silver, Gold, Copper and Silicon from Electron Elastic Peak Intensity Ratios

抄録

We have determined inelastic mean free paths (IMFPs) in silver, gold, copper, and silicon in the 50-5000 eV energy range from electron elastic peak intensity ratios to a nickel reference material, and Monte Carlo simulations. The resulting IMFPs were analyzed using Fano plots, and those values for silver, gold and copper could be fitted by the Bethe equation in the 50-5000 eV energy range. The resulting IMFPs for Ag, Au, Cu, and Si are in excellent agreement with IMFPs calculated from the Penn algorithm or the TPP-2M equation in the 200-5000 eV energy range.