Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
- Data Analysis and Processing -
Optimization of XPS Inelastic Background using Tougaard’s Formula
—Recent Progress
Masatoshi Jo
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2002 年 9 巻 3 号 p. 295-301

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Recent development of background optimization is described. Assumed peak intensities and boundaries for integration that were fixed in the former version can be treated as optimization parameters. The ‘effective’ loss function is allowed to take negative value to analyze non-uniform material. In addition to peak ratio and tail intensity, peak intensity is treated as a new optimized functional. The Al XPS spectrum is analyzed.
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© 2002 by The Surface Analysis Society of Japan
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