イオンプレーティング法による酸化マグネシウム薄膜の作製

抄録

MgO thin films are applied to the protective layer of plasma-dispray devices, because of high secondery electron emission and low sputtering rate. In this study, We investigated the formation of MgO thin films by ion-plating process. The MgO thin films by ion-plating process showed high transparency and high deposition rate.