抄録
It is reported that deposited TiN thin films have preferred orientation in recently years. Those films have the fiber texture structure. However, TiN thin films having [111] fiber texture near the single crystal structure by physical vapor deposition was treated in this study. There is no procedure to evaluate the stress-strain state for such sample. Therefore, a new procedure of X-ray stress measurement for single crystal having [111] fiber texture is proposed. In addition, the procedure is compared with precedent procedure up to present. The crystallite orientation was evaluated by the pole figure, and the residual stress was measured using Cu-Kα radiation with three methods. METHOD1 is the model of polycrystals, METHOD2 is the model of single crystal and METHOD3 is the way used a convenient measurement technique that is proposed by Tanaka et al. for single crystal. As a result, the stress using the single crystal model and using the polycrystals model had similar value. In METHOD3, the value between σ_<11> and σ_<22> made a little difference.
