Dynamics & Design Conference
Online ISSN : 2424-2993
セッションID: 243
会議情報
243 免震半導体工場の総合的アクティブ微振動制御 : スマート構造による内生微振動の制御-その2
嶋崎 守藤田 隆史橋本 嘉之吉岡 宏和北原 隆小川 智浩藤川 正行
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Comprehensive active microvibration control system will be required in base-isolated precision manufacturing facilities, in order to control both microvibrations generated by equipment and persons in the buildings and excited by external disturbances such as ambient ground vibrations and winds. A smart structure using piezoelectric actuators was tested for the overall active microvibration control in a base-isolated 2-story steel frame building model of a 5×3×4H m external size and a 6,900 kg total mass which was supported by 4 multistage rubber bearings. The tests showed that the smart structure could effectively control three-dimensional microvibrations generated in the building model.
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© 2003 一般社団法人 日本機械学会
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