抄録
A system identification technique for a vibration isolation table by using subspace method (N4SID) and Frequency-Domain Least-Squares Approximation (FDLSA) is studied in this paper. The vibration isolation table is supported by four pneumatic actuators at corners of the table. A 3DOF mathematical model of the vibration isolation table is constructed. The regulator for the pneumatic actuator is driven by a stepping motor. A procedure to obtain the minimum-order-model is proposed, and the procedure can be fully automated. Effectiveness of proposed approach is examined by experiments.
