抄録
Auto tuning of vibration isolation table by using system identification is studied in this paper. Subspace method and Frequency-Domain Least-Squares Approximation (FDLSA) are used for system identification. In proposed method, we can obtain a minimum order model. Then, it is easy to optimize the controller for the obtained model. This procedure can be fully automated. The isolation table in this study has actuators using air spring at corners of the table. Force of actuators can be adjusted by stepping motors in the regulator. Effectiveness of the proposed approach is examined by experiments and simulation.
