抄録
The calibration method based on a vector space theory has been proposed for multi-axis accelerometers. In this method, acceleration generated from a 3-DOF vibration table and the output signal from calibration target accelerometers are treated as vector quantities and a calibration result is described as a matrix. This method has many advantages of short measurement time and cross sensitivity evaluation. In order to realize more efficient measurement, a simultaneous calibration technique is required. However, it is supposed that uncontrolled rotational motion of a 3-DOF vibration table generates position dependency on some of the elements of sensitivity matrix. This paper reports the effect of rotational motion on the vibration table in the sensitivity matrix calibration of an SOI capacitive 3-axis accelerometer. In order to clarify the rotation effect on sensitivity, we made a 6-DOF reference sensor in combination of 3 single axis accelerometers and 3 single axis gyros As a result, certain elements of the cross sensitivity show the position dependency at a 150Hz excitation, which could be near the resonant frequency of rotation. This result is explicable by approximate expression of sensitivity calculation.
