四つの空気ばねで支えられた卓上型除振台の制振性能

抄録

The vibration isolator discussed in this study consists of two rectangular plates with four air springs inserted between them. Each air spring has a main tank and reservoir tank connected by a small diameter pipe. Because this structure has week rigidity in the horizontal direction, guide shafts are provided to constrain the movement of the table only in the vertical direction. The guide shafts are supported by gas bearings to minimize sliding friction. Both the equivalent spring constant and the equivalent damping coefficient of the vibration isolator are generated by two of the cause. One is caused by the air flow, which can be calculated theoretically. The other is generated by the compression, expansion and sliding friction of the rubber membrane, which is impossible to calculate. The latter was measured experimentally. Thus, the frequency response of the vibration isolator system was calculated from a simplified expression. The calculation results are in good agreement with the eperimental values, and the correctness of our calculation method has been demonstrated.