Nano-micro Meter Size Geometry Measurement Using Variable Phase-contrast Microscope With Piezo-electric Actuator

Abstract

The geometry measurement method that changes a phase by a part of reflective mirror precise movement is proposed, and is applied for the phase difference microscope system. Using this principle, the variable phase-contrast microscope that can measure nano-micro meter size geometry at high speed and high precise is examined. For this purpose, a silicon mirror with height differences was fabricated and the optical system using the device with the piezo-electric actuator was configured. Using this system, the principle of the nano-micro meter size geometry measurement was confirmed.