IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
セッションID: 202
会議情報
エリプソメトリー顕微鏡によるナノ分子膜の膜分布の定量観測(マイクロナノ理工学,IIP2004 情報・知能・精密機器部門講演会)
中田 旭福澤 健二志牟田 太一張 賀東三矢 保永
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会議録・要旨集 フリー

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抄録
Direct visualization method for molecularly thin lubricant films on magnetic disks is presented. Visualization of a molecularly thin film is an extremely useful technique for the investigation of replenishment and retention of thin lubricant films. Ellipsometry can provide thickness and refractive index of a molecularly thin film. We demonstrated ellipsometric microscopy using a white light source could provide improvement of signal to noise ratio of images. However, measurement of absolute thickness of films has not been established, although the relative thickness can be obtained by intensity of images. In this report, method for measuring the absolute thickness of films has been presented.
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© 2004 一般社団法人 日本機械学会
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