抄録
This paper describes fabrication process and actuation properties of micro-actuator utilizing a conducting polymer for cell stimulation. Photo resist was patterned to 10 μm diameter hole-array on an ITO glass. This substrate was used as a working electrode for electro deposition of poly pyrrole (PPy). A PPy dot-array was deposited on ITO exposed area of the substrate. When electro charge reached 130 mC, diameter and height of PPy dots were 18 ±2 μm and 2 μm, respectively. +1 V and -1 V were applied to the PPy dots in NaDBS solution. PPy dots repeated expanding and swelling with the change of voltage. The maximum expansion rate was about 10 %. It shows the success of fabrication of conducting polymer micro-actuator.
