抄録
In the near future, it will be necessary to manufacture different size and shape of micro optics to meet the present demands of this new century. Now, there are some manufacturing processes of micro optics such as mechanical process, MEMS etc. Manufacturing of different size and shape of micro optics by mechanical process is useful for mass production, but it is very costly for small production. Moreover, by mechanical process it is not possible to manufacture micro optics less than Φ100μm. On the other hand, MEMS is a effective technology to produce many micro optics less than Φ100μm on a same glass surface, but it is not a suitable process on the point of economical and environmental concern to produce different size and shape of micro optics. Now, it is necessary to develop a suitable and flexible manufacturing process of different size and shape of micro optics components based on new mechanism. In this paper, using Nd : YAG laser, a new manufacturing process of micro optics has been proposed applying the glass transition temperature phenomenon. Experimental results show that the proposed methods are very useful for practical uses and also very effective on the view point of economical and environmental concern.
