抄録
A novel three-dimensional probing technique for micro parts with high aspect ratios is proposed. In this technique, a particle trapped optically at the optical fiber tip is used as a probe for position detection. Numerical analysis about the optical force and detection signal were demonstrated by using finite difference time domain method (FDTD) and Maxwell stress tensor. And also fundamental optical fiber trapping experiments were demonstrated in the water. For the first, a probe sphere was levitated by illumination from the laser, and laser light emitted from the optical fiber successfully trapped the probe sphere three-dimensionally.
