抄録
An X-ray microscope is a very useful tool to investigate nanometer-scale fine structure in biological applications. We consider the Wolter type I aspheric mirror which is a key optical element in the X-ray microscope and requires a super smooth surface and a highly accurate figure. This paper deals with the fabrication of soft X-ray microscope mirrors by a replication method. Precise aspheric gold mirrors were obtained from a master mandrel successfully.
