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Cover1-
発行日: 2005/10/18
公開日: 2017/06/19
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App1-
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発行日: 2005/10/18
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Yoshiharu Namba
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p.
A1-A2
発行日: 2005/10/18
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App4-
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原稿種別: 目次
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Toc1-
発行日: 2005/10/18
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J. Sun, M. Rahman, Y.S. Wong, G.S. Hong, Y. Sun
原稿種別: 本文
p.
893-898
発行日: 2005/10/18
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Neural networks (NNs) are widely used in intelligent tool condition monitoring (TCM) system, however, its effective application is still an ongoing research issue. This paper investigates some problems related with this topic, such as the selection of monitoring signals and signal feature set, and construction of performance evaluation function in TCM decision making, so as to realize reliable tool condition identification. Firstly, sensing signal selection and feature set selection are investigated. The former aims to choose the proper monitoring signals in terms of the above mentioned requirements. And the latter is to comprehensively take this monitoring signal features and identify the most effective set so as to give robust and reliable tool condition identification. From the viewpoint of reducing manufacturing cost, an evaluation function with the machining loss consideration is proposed as criteria in decision making. Besides, two related problems in TCM system design are discussed, multiclassification of tool states and hybrid system. Acoustic emission (AE) signals and cutting force signals from titanium machining, and AE signals from steel machining are used in this study.
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H. SHAO, H.J. ZHOU, X. LI
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p.
899-903
発行日: 2005/10/18
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Correlations among cutting forces, tool condition and surface integrity of machined surfaces in facing have been investigated in this paper. A set of experiments were performed on a CNC lathe without coolant. SANDVIK tool inserts (type PF4015) were used to cut 45 carbon steel. It was found with the experiments that 1) Tool wear could be identified from the texture of a machined surface based on the gray level co-occurrence matrix. 2) Surface roughness and cutting forces could be used as indices of medium (VB>0.1mm) and large (VB>0.2mm) tool flank wear in facing 3) Residual stresses in radial direction of a machined surface tend to decrease as tool wear grows in facing.
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Ryuichi IWAMOTO, Noriyuki OKUBO, Eiji KONDO, Koichi ICHIKI, Norio KAWA ...
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p.
905-910
発行日: 2005/10/18
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It is well known that brittle materials such as glasses, silicon and so on, can be machined ductile mode cutting like soft metals when the depth of cut is less than critical depth. Face turning using R shaped tool were carried out two types of cutting method (Extreme low feed cutting and Extreme small depth cutting) to distinguish brittle mode from ductile mode by AE signal and cutting forces. Perfectly mirrored surface with roughness (PV) of several tens nanometers can be obtained when maximum undeformed chip thickness was thin in extreme low feed cutting. RMS value of AE signal was larger and cutting force ratio (Thrust/Principal force) was lower when PV of machined surface was larger.
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Masahiko SATO, Takashi UEDA, Hisataka TANAKA
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p.
911-914
発行日: 2005/10/18
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The binderless CBN tool tip temperature in end milling was measured using a two-color pyrometer with optical fibers. The infrared rays radiated from the tool-chip interface and transmitted through the CBN were accepted by the optical fiber and led to the two-color pyrometer through a rotary fiber coupler. The rake face temperature of the tool tip in the up milling of 0.55% carbon steel ranged from 480℃ to 560℃ for cutting speeds ranging from 2.2 to 4.4m/s.
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Katsuhiko SEKIYA, Yasuo YAMANE, Ayumu TORIMOTO
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p.
915-920
発行日: 2005/10/18
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In-process tool life detecting system has been developed. To detect tool life, a TiN thin film band having electric conductivity was coated parallel to cutting edges on flank face of a ceramic insert having no electric conductivity. A coil and a capacitor were connected in series to the sensor insert to make a series resonance circuit in a tool holder for turning, or in an arbor for face milling. A detecting coil with high frequency oscillator was coupled to the coil in the holder/arbor electromagnetically. An electromagnetic induction between two coils was used to take the signal from the insert. The system developed in this study showed good stability against electric noises from an environment especially machine tools.
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Koji TERAMOTO, Ryuichi TANAKA, Tohru ISHIDA, Yoshimi TAKEUCHI
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p.
921-926
発行日: 2005/10/18
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This paper deals with an adaptive visualization method of the thermal state in machining operation. The visualization is expected to enhance the recognition ability of operators. First a framework of thermal state visualization is proposed. Then, a sensor-configured heat conduction simulation is proposed as an estimation method of a machining workpiece. The method is based on the association of sensed data with the process simulation. As an implementation of adaptive estimation, a prototype system is developed. A configuration of the prototype system is illustrated. Results of a simple example are shown. The results indicate the possibility of adaptive estimation. Finally, a conclusion and future works are presented.
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Kenji SHIMANA, Eiji KONDO, Akihiro MATSUO, Kouichi HAGIHARA, Norio KAW ...
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p.
927-932
発行日: 2005/10/18
公開日: 2017/06/19
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Dies with high accuracy in shape is difficult to be machined with a small diameter end-mill, since the end-mill deflects on a large scale at a cutting point due to cutting forces. In this research, relationship between machining errors and cutting forces in sideway cutting with a small diameter end-mill is investigated experimentally in order to estimate the deflection of end-mill at a cutting point by using measured cutting forces. As a result, it was concluded that machining errors could be estimated from thrust forces at the moment when the cutting point without deflection of an end-mill exceeds slightly from the cutting point closest to finished surface during its rotation.
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Lin LU, Hisataka TANAKA, Masahiko SATO, Bernard W. IKUA, Yoshihito MAE ...
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p.
933-938
発行日: 2005/10/18
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This research effort is focused on finding out the influence of cutting direction on machining error in ball end milling of cylindrical surface. Ball end milling process is often used to machine sculptured surfaces of molds, dies and various aerospace components that often have to be of high dimensional and geometric accuracy. But for the complicated surface geometry, it is often difficult to select appropriate cutting conditions to achieve high productivity while maintaining part quality. In this study, the machining error in arbitrary cutting direction in ball end milling of cylindrical surface is investigated. The influences of cutting direction in different cutting conditions are clarified with measured machining errors. Then the appropriate cutting conditions for different cutting modes are discussed.
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Makoto KIKUCHI, Katuo KOISHIKAWA, Masatake SHIRAISHI
原稿種別: 本文
p.
939-944
発行日: 2005/10/18
公開日: 2017/06/19
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In this paper, the relationship between the cutting resistance force and the machine state was investigated regarding the drilling of small diameter holes by analyzing actual experimental data. From these results, the feasibility of controlling the machine state in terms of the position and rotation angle of the cutting edge and estimating the conditions from a control engineering viewpoint were theoretically examined. The mathematical model in this study provided an observable condition in terms of the position and rotation angle of the cutting edge using state observers.
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Masaki IZAWA
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p.
945-950
発行日: 2005/10/18
公開日: 2017/06/19
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In this study, the grinding wheel rotational speed was measured in a grinding process to monitor the grinding force and two methods-the deceleration slope method and the speed difference square method-were proposed. To enable the automatic computation of these parameters and to eliminate differences in parameter calculation between individuals, the determination of monitoring parameters was standardized. From experimental result, the standardized speed difference square method in this study showed very strong correlation with the tangential grinding force, and was not affected by the surface properties of the grinding wheel.
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App8-
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M. Sharif UDDIN, Soichi IBARAKI, Atsushi MATSUBARA, Susumu NISHIDA, Yo ...
原稿種別: 本文
p.
951-956
発行日: 2005/10/18
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During end milling with contour-parallel (CP) offset tool paths, the tool experiences a varying engagement with the workpiece, which leads to a variation in cutting forces. In a finishing process, such variation of cutting forces causes the degradation of machining accuracy and surface finish. Presented in this paper is to propose an algorithm to generate a new offset tool path generation scheme, which regulates a constant cutting engagement with workpiece in 2.5D end milling. By maintaining cutting engagement constant, the cutting force can be regulated approximately constant, thus minimizing the variation of tool deflection, and improving machining accuracy. The validity of the proposed tool path generation scheme is realized experimentally when is applied to a semi-finishing path in pocket milling. Potential benefits revealed from the experimental results include far less variation of cutting forces, and consequently enhanced machining accuracy without increasing the machining time.
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Yoshitaka MORIMOTO, Yoshio ICHIDA, Ryunosuke SATO, Akihumi SAITO
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p.
957-962
発行日: 2005/10/18
公開日: 2017/06/19
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A new positioning system has been developed to realize both the fine motion and the coarse motion independently and/or simultaneously to reduce the positioning time and to improve the positioning accuracy. The main characteristic of the developed mechanism that consists of two stepping motors and mechanical parts is simple setup and no stroke limitation in the fine motion. The basic performances were evaluated by adopting the open loop positioning system. The developed positioning system demonstrates the effect of hybrid positioning and the practical utility.
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Toru UNNO, Yoshitaka MORIMOTO, Yoshio ICHIDA, Ryunosuke SATO
原稿種別: 本文
p.
963-968
発行日: 2005/10/18
公開日: 2017/06/19
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In this report, real-time inverse transfer function method is proposed to achieve rapid and precise positioning of an NC table. The transfer function is assumed as the second-order lag system. The parameters of dynamic characteristics are identified in real-time, considering change of the parameters, by piecewise linearization. Nonlinear characteristics are contained in the parameters in this operation. The compensated input calculated by the identified parameters is fed into the NC driver in real-time. Experimental control results showed the considerable improvement of trajectory accuracy over 37% compared with the conventional method results.
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Tsuyoshi NAKAMURA
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p.
969-974
発行日: 2005/10/18
公開日: 2017/06/19
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With high integration of a semiconductor, development of ultra-precision positioning table system used for high vacuum equipment is needed. Technology to realize the ultra-precision positioning table system is adoption of aerostatic bearings to guide elements. However there are many problems for aerostatic bearings for high vacuum equipment. Therefore, with the aim of developing the future positioning table system for high vacuum equipment, the moving rail type aerostatic positioning table with the differential pumping seal, which is based on a new design concept and desirable structural configuration, has been developed. The paper presents a structural configuration of the developed aerostatic positioning table and the performance evaluation in high vacuum environment.
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Katsushi FURUTANI, Katsumi KAWAGOE, Yoshitaka MIEDA
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p.
975-980
発行日: 2005/10/18
公開日: 2017/06/19
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This paper deals with AZARASHI (Seal) mechanism with three degrees of freedom for a positioning stage of an atomic force microscope. A driving method for an L-shaped device was improved to reduce the straightness error in the translation motion. When the device moved in the x- or y-direction, the displacement in another orthogonal direction was about 10% and a rotation was observed. The interference in the translation was proportional to the displacement in the driven direction. Both the piezoelectric actuators are extended or contracted simultaneously to cancel out the moment. Then, AZARASHI Mechanism was applied to an AFM stage. A stage consists of an L-shaped device for the x- and y-motions mounting a piezoelectric actuator for the z-motion. A force curve was measured to calibrate the sensitivity. The straightness of the device motion in the z-direction was evaluated by measuring an optical flat.
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S.H. Kweon, W. Wang, S.H. Yang
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p.
981-986
発行日: 2005/10/18
公開日: 2017/06/19
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A Contouring motion is required to machine a free form shape on a CNC machine tool. To improve quality of machining shape, the contour error as well as the tracking error should be controlled in a contouring motion. A contour error controller is most effective method to reduce the contour error. In this paper, a new approach to a multi-axis contour error controller (CEC) is proposed. The proposed CEC uses only reference and actual position information based on the contour error vector without regard to input-data-type and alters the gain of contour error controller according to the magnitude of each error component, In addition, the experimental results on a 3-axis motion system show that the proposed CEC has high performance in reducing the contour error.
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Guilherme Jorge MAEDA, Kaiji SATO, Hitoshi HASHIZUME, Tadahiko SHINSHI
原稿種別: 本文
p.
987-992
発行日: 2005/10/18
公開日: 2017/06/19
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This paper describes the control of an XY nano-positioning table for a compact nano-machine tool. The aim of its controller design is to provide (1) high motion accuracy, (2) high robustness to disturbance forces and (3) high bandwidth. The controller has a PID element as a tandem compensator and a feedforward compensator. A bandpass filter is added so that the table system can show the mentioned specifications (1) and (2). The reference following characteristic and the robustness to disturbance forces are examined and evaluated theoretically and experimentally. The results prove that the table control system is suitable for a compact ultraprecision machine tool, attaining high positioning accuracy and frequency response up to 500Hz in a circular motion of a 100nm radius.
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Ryuta SATO, Yuya YOKOBORI, Masaomi TSUTSUMI
原稿種別: 本文
p.
993-998
発行日: 2005/10/18
公開日: 2017/06/19
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This paper describes the dynamic synchronous accuracy of translational and rotational axes in 5-axis machining centers. In this study, non-uniform 3-axis synchronous motion was investigated in order to estimate the dynamic synchronous accuracy. A dynamic model of the each axis including a rotary axis was developed, and the synchronous motion was simulated. The dynamic model mainly consists of a moment of inertia, friction forces, a velocity controller and a position one. As the results of experiment and simulation, it is clarified the developed model can express the experimental results accurately. In addition, a method that can improve the synchronous accuracy is proposed, and its effectiveness is verified by the developed dynamic model.
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S. SOARES, A. FUSHIKI, Y. NAMBA
原稿種別: 本文
p.
999-1002
発行日: 2005/10/18
公開日: 2017/06/19
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A single point diamond turning (SPDT) facility is utilized for the ultra-precision machining of planar surfaces, and aspheric mirror components for geo-orbital x-ray telescopes and x-ray microscopes. The spindle of the machine tool is encased in an ultra-precision hydraulic bearing, and the motion controller is programmable to nanometer resolution. The radii of diamond cutting tools, utilized in the SPDT process, approach nanometer accuracy. This combination of parameters produces planar and aspheric components with nanometer surface and shape quality. We examine the radial and axial motion of the spindle in the static and dynamic domains with an optical nanometer-resolution sensor. The sensing geometry is based on standard optical triangulation off the target surface, and the sensor can be calibrated in situ utilizing the position controller of the machine. We present results, which examine the parametric performance of the diamond turning operation. At 1000rpm we measured a minimum of approximately 35-nm rms radial and the axial spindle error motion.
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J. Neou, C.L. Chao, C.W. Chao, J.J. Chen
原稿種別: 本文
p.
1003-1008
発行日: 2005/10/18
公開日: 2017/06/19
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Increased accuracy and higher repeatability for precision positioning systems have recently been the main requests in areas such as ultra-precision machine tools and semiconductor technologies. In order to minimize the non-linear stick-slip effect in the system, an air lubricated slide with friction drive has been developed and the micro-dynamic characteristic of the stage was evaluated under different aerostatic slide pressure and preload. A PID controller was used in the closed loop control system and an optic scale with 1nm resolution was used for precision position measuring. The micro-dynamic characteristics of the stage were evaluated under different aerostatic pressures and preloads of the friction drive. The results showed that the rms value of the measurement noise was about 10nm. With the PID controller inactivated, it was found that the rms value of the error motion reduced significantly when the preload of air lubricated friction drive got activated (from around 130nm dropped to under 20nm in the case of 0.2Mpa air slide pressure). Frequency spectrum analysis indicates that the noise is higher at 5Hz and 35Hz and can be reduced by increasing the pressure of air-slide.
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Hiroshi MIZUMOTO, Yoshito YABUTA, Shiroh ARII, Yoichi Tazoe, Yoshihiro ...
原稿種別: 本文
p.
1009-1014
発行日: 2005/10/18
公開日: 2017/06/19
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A novel tri-mode ultraprecision positioning system is proposed. The basic coarse mode for nanometer positioning with long stroke and the fine mode for sub-nanometer positioning are executed by using the Twist-roller friction drive (TFD). The ultra-fine mode utilizes the aerostatic guideway with the Active Inherent Restrictor (AIR) for realizing picometer positioning. The performance of the ultra-fine mode is analyzed and the experimental results of step positioning in the range of sub-nanometer and are shown.
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Tadahiko SHINSHI, Yusuke INAMI, Hitoshi HASHIZUME, Kaiji SATO, Akira S ...
原稿種別: 本文
p.
1015-1018
発行日: 2005/10/18
公開日: 2017/06/19
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An active aerostatic spindle with an axial-positioning actuator has been developed to aid the fabrication of ultra-precision and compact machine tool elements. The spindle incorporates a pair of radial air bearings that not only work as high-precision radial bearings to support the spindle shaft, but which also act as a linear guide-way in the axial direction. The rotating shaft has a peak-to-peak vibration amplitude of less than 20nm in the axial positioning direction, and an NRRO (None Repeatable Run-Out) of 8nm in the radial direction. In order to evaluate the limit of resolution of the aerostatic spindle for axial machining, ultra-micro steps were machined on oxygen-free copper plates using a single crystal diamond tool. The minimum step-height and surface roughness of the machined structure were 25nm and about 10nmRa, respectively.
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App9-
発行日: 2005/10/18
公開日: 2017/06/19
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M.N. CHENG, C.F. CHEUNG, W.B. LEE, S. TO
原稿種別: 本文
p.
1019-1024
発行日: 2005/10/18
公開日: 2017/06/19
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In this paper, an optimization system is presented for the analysis of surface roughness in ultra-precision raster milling. This system is used to search for the optimal cutting condition with an incremental step size within a pre-defined range of process parameters for different cutting strategies based on the minimum surface roughness criteria. The outputs of the optimization system are suggested optimum cutting conditions and a performance characteristic diagram that depicts the variations in surface roughness with the process parameters being investigated. Two experiments were performed to verify the performance of the system under various cutting conditions and cutting strategies. A good agreement was found between the experimental and theoretical results.
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Y.K. Sze, W.B. Lee, C.F. Cheung, S. To
原稿種別: 本文
p.
1025-1028
発行日: 2005/10/18
公開日: 2017/06/19
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In most existing theories of metal cutting, the workpiece is assumed to be homogeneous and most continuum theories do not take into account the effect of crystallographic anisotropy, which causes the anisotropy of surface roughness. In single-point diamond turning, the depth of cut is small and cutting is usually performed within individual grains and the machined surface finish is significantly affected by the crystallographic orientation of the workpiece materials. In this paper, an experimental investigation was conducted to study the effect of rolling texture on the anisotropy of surface roughness in the single-point diamond turning of polycrystalline aluminum. Various textures in metals and alloys were prepared by a rolling and annealing treatment. A series of cutting tests were conducted under various depths of cut. The experimental results indicate that straight-rolled polycrystalline aluminum possesses a higher degree of roughness anisotropy than the cross-rolled variety. The effect of roughness anisotropy is found to decrease as the depth of cut increases. The findings provide an important means for improving surface quality in the diamond turning of polycrystalline materials.
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Yuji Yamamoto, Hirofumi Suzuki, Tadashi Okino, Toshimichi Moriwaki
原稿種別: 本文
p.
1029-1034
発行日: 2005/10/18
公開日: 2017/06/19
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This paper deals with precision grinding of micro lens array (fly eye) by using a resinoid bonded diamond wheel. An ultra-precision grinding system of micro lens array was developed. In this system, a resinoid bonded diamond wheel was 4-dimentionally controlled with 1nm resolution by linear scale feedback system and scanned on the workpiece surface. New truing method of resinoid bonded diamond wheel by using a vanadium alloy truing tool was developed and its performance was obtained high preciseness and high truing rate. Finally, the micro lens array molding dies of a fine grain tungsten carbide were tested the resinoid bonded diamond wheel to evaluate grinding performance.
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Jiwang YAN, Yasunori TAKAHASHI, Jun'ichi TAMAKI, Akihiko KUBO, Ts ...
原稿種別: 本文
p.
1035-1040
発行日: 2005/10/18
公開日: 2017/06/19
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Germanium is an excellent infrared optical material. On most occasions, single-crystalline germanium is used as optical lens substrate because its homogeneous structure is beneficial for fabricating uniform optical surfaces. In this work, we attempt to use poly crystals as lens substrates instead of single crystals, which may lead to a significant reduction in production cost. We conducted ultraprecision cutting experiments on poly-crystalline germanium to examine the microscopic machinability. The crystal orientations of specific crystal grains were characterized, and the machining characteristics of these crystal grains including surface textures, cutting forces, and grain boundary steps were investigated under various machining conditions. It was possible to produce uniformly ductile-cut surfaces cross all crystal grains by using an extremely small undeformed chip thickness (〜80nm) under high negative tool rake angles (〜45°). This work indicates the possibility of fabricating high-quality infrared optical components from poly-crystalline germanium.
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Koichi OKUDA, Shusaku NAKAGAWA, Naoki FUJIWARA, Yuichi UTSUMI, Nobuji ...
原稿種別: 本文
p.
1041-1046
発行日: 2005/10/18
公開日: 2017/06/19
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This paper deals with an experimental study on ultra-precision diamond cutting of photo resist. A good surface flatness of photo resist is needed to make three-dimensional micro structure by multi-layer LIGA-like process. In this study, an ultra-precision cutting technology is applied to UV lithography process in order to fabricate a flat structure of thick photo resist. The direct cutting of thick photo resist by diamond cutting tool was attempted before and after UV exposure. The surface integrity and the flatness of micro pattern were estimated. In result, the variation of steps was 2μm or less, while it was 130μm or more in the case that the diamond cutting was not applied. The roughness of finished surface by cutting was 0.01μm in arithmetic average roughness Ra.
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Kwon Su Chon, Yoshiharu Namba, Kwon-Ha Yoon
原稿種別: 本文
p.
1047-1050
発行日: 2005/10/18
公開日: 2017/06/19
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An X-ray microscope is a very useful tool to investigate nanometer-scale fine structure in biological applications. We consider the Wolter type I aspheric mirror which is a key optical element in the X-ray microscope and requires a super smooth surface and a highly accurate figure. This paper deals with the fabrication of soft X-ray microscope mirrors by a replication method. Precise aspheric gold mirrors were obtained from a master mandrel successfully.
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M.C. KONG, W.B. LEE, C.F. CHEUNG, S. TO
原稿種別: 本文
p.
1051-1056
発行日: 2005/10/18
公開日: 2017/06/19
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The influence of materials swelling on surface roughness in single-point diamond turning was investigated. The normalized extent of swelling is characterized by the swelling significant index, defined based on power spectral density. Materials swelling was found to be significant in single-point diamond turning although it has been unnoticed in conventional machining. Experimental results from the power spectrum analysis indicate that the profile of tool marks is distorted by the effect of the swelling of the materials being cut. Copper alloys have more of a swelling effect than aluminum alloys owing to their higher ductility. The findings in the present study provide an important means for improving the surface finish of the diamond-turned surfaces.
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M. TERCELJ, A. SMOLEJ, T. VECKO-PIRTOVSEK, R. TURK
原稿種別: 本文
p.
1057-1062
発行日: 2005/10/18
公開日: 2017/06/19
会議録・要旨集
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Dies with narrow and deep gaps, made from AISI H10 die steel, were nitrided by various manufacturers of equipment for ionic and gas nitriding. The manufacturers themselves, based on their experience with extrusion dies, chose the optimal nitriding parameters. The microstructure obtained showed differences with regard to the presence or absence of a compound layer, its thickness and ε/γ' phase ratio (XRD), nitriding depth and microhardness values. The nitriding depths obtained, the maximum microhardness of the nitrided surfaces and ε/γ' phase ratio were usually similar on dies of the same manufacturer, while for different die manufacturers these values differ. Samples with the various nitrided microstructures mentioned were laboratory tested for wear resistance by a newly designed test rig that provided simulation of the tribological conditions of hot extrusion of aluminium. The results of the study indicate that dies with a greater nitriding depth (diffusion zone) in combination with a compound layer mainly composed of only one phase (in our case ε phase) exhibited better wear resistance than those with a lower nitriding depth and with an equal share of the two phases.
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C.L. Chao, W.C. Chou, K.J. Ma, T.T. Chen, Y.M. Liu, S.W. Huang, H.Y. L ...
原稿種別: 本文
p.
1063-1068
発行日: 2005/10/18
公開日: 2017/06/19
会議録・要旨集
フリー
Diamond, having many advanced physical and mechanical properties, is one of the most important materials used in the mechanical, telecommunication and optoelectronic industry. However, high hardness value and extreme brittleness have made diamond a very difficult material to be machined by conventional mechanical grinding and polishing. In the present study, the microwave CVD method was employed to produce epitaxial diamond films on silicon single crystal. Reactive ion etching (RIE), laser ablation and thermo-chemical polishing experiments were then conducted on the obtained diamond films. The underlying material removal mechanisms, microstrucrure of the machined surface and related machining conditions were also investigated. It was found that during the laser ablation, peaks of the diamond grains were removed mainly by the photo-thermal effects introduced by excimer laser. The diamond structures of the protruded diamond grains were transformed by the laser photonic energy into graphite, amorphous diamond and amorphous carbon which were removed by the subsequent laser shots. Laser ablation could improve the surface roughness from above 1μm to around 0.1μm in few minutes' time in this study. However scanning would be required to cover a large area, and, as a consequence, it could be very time consuming. Thermo-chemical polishing, in the other hand, was proved to be able to remove the diamond film very effectively (4.8μm deep of diamond film was removed in 30 minutes when polishing at 550℃ and 5.7m/s) and the removal rate increased with polishing speed, temperature and pressure. Gases such as O_2, O_2/CF_4, O_2/SF_6 were used as the reactive gases in the RIE experiments and it was found that O_2 and O_2/SF_6 offered better results. However, the obtained etch rates were higher at areas like grain boundary and sharp corners which made further improvement of surface roughness very difficult.
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Hirokazu FUJIYAMA, Masayoshi NAKAMURA, Kazumasa HAMASAKI, Tsunetaka SU ...
原稿種別: 本文
p.
1069-1074
発行日: 2005/10/18
公開日: 2017/06/19
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Four types of target with carbon contents of 50mol%, 55mol%, 60mol% and 67mol% were used to evaluate the characteristics of sputtered silicon carbide films as functions of the carbon content of the target. Film hardness decreases to a minimum value for the carbon content of 55mol% and then increases with a further increase in the carbon content of the target. The friction and wear tests carried out using a pin-on-disktype test machine showed that the friction coefficient of the films decreases from 0.14 in the case of using a target with a carbon content of 55mol% to 0.08 in the case of using a target with a carbon content of 67mol%, and that the wear resistance of the films increases with increasing carbon content of the target.
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Tomohiro SASAKI, Takao YAKOU
原稿種別: 本文
p.
1075-1079
発行日: 2005/10/18
公開日: 2017/06/19
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The intermetallic compound Fe_3Al was processed by a reactive sintering process, and its machinability was investigated using dry turning. In cutting Fe_3Al with a cemented carbide tool, the tool life was approximately one tenth that of cutting carbon tool steel SK3 because of intense flank wear. The tool life for cutting Fe_3Al using the cemented carbide P20 tool was longer than for cemented carbide K10, and a cermet tool reached its tool life limit by chipping for the whole cutting speed range measured. The roughness of the machined surface of Fe_3Al cut using a cemented carbide tool was much smaller than for SK3. However, for cutting using the cermet tool, the roughness showed a sharp rise due to chipping. It was found that tool wear could be attributed to the removal of reinforcement particles. The cemented carbide P20 is suitable for cutting Fe_3Al, and further, highly accurate cutting is possible for Fe_3Al because of the good surface finish.
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Warse KLINGENBERG, Thomas DE BOER
原稿種別: 本文
p.
1081-1086
発行日: 2005/10/18
公開日: 2017/06/19
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原稿種別: 付録等
p.
App10-
発行日: 2005/10/18
公開日: 2017/06/19
会議録・要旨集
フリー
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C.F. CHEUNG, L.B. KONG, W.B. LEE, S. TO
原稿種別: 本文
p.
1087-1092
発行日: 2005/10/18
公開日: 2017/06/19
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Due to the geometrical complexities, the prediction of form accuracy in ultra-precision raster milling of optical free form surfaces is more difficult than conventional machining. Nowadays, the achievement of submicrometer form accuracy still depends largely on the experience and skills of the machine operators through an expensive trial-and-error approach. In this paper, a model-based simulation system is presented for the prediction of form accuracy in ultra-precision raster milling. The system takes into account the cutting mechanics, cutting strategy and the kinematics of the cutting process. Preliminary experimental work has been done to verify the model and the predicted results agree well with the experimental results. Ultra-precision raster milling is an expensive and complex process, the successful development of the model-based simulation system allows the optimum cutting parameters and cutting strategies to be determined without the need to conduct massive and costly trial-and-error cutting tests.
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Takashi MATSUMURA, Motohiro SHIMADA, Kazunari TERAMOTO
原稿種別: 本文
p.
1093-1098
発行日: 2005/10/18
公開日: 2017/06/19
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The cutting processes in milling and drilling are simulated to design tool geometries for the machining operations on machining centers. The presented simulation predicts the cutting force and the chip flow direction based on an energy approach, which interprets the chip flow model in three-dimensional cutting process as a pile of orthogonal cuttings. A milling process with a tilted tool is shown to verify the simulation in the machining operation on the multi-axis machining center. A drilling process is simulated to show the change of the cutting force and the chip flow direction in machining of a hole on a plate. Because the energy approach can be applied to the machining processes with the diversified tool geometries using only the orthogonal cutting data, this paper discusses the effect of tool geometry on the cutting process. A parametric study is tried to improve the geometry on the chisel of the drill.
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Motohiro SHIMADA, Kazunari TERAMOTO, Takashi MATSUMURA
原稿種別: 本文
p.
1099-1104
発行日: 2005/10/18
公開日: 2017/06/19
会議録・要旨集
フリー
A cutting simulator based on energy approach is implemented in a process planning system, which determines the process parameters in the milling operations. The required data for the analysis is identified to minimize the discrepancy between the calculated and the measured cutting force in some reference operations. The identification function in the implemented simulator is applied to the process planning system as a module of self-management of the database. Some case studies, then, are shown to verify the simulation module in the process planning system. An application of the simulator is presented to determine the applicable cutting conditions according to the machining requirements.
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