抄録
Four types of target with carbon contents of 50mol%, 55mol%, 60mol% and 67mol% were used to evaluate the characteristics of sputtered silicon carbide films as functions of the carbon content of the target. Film hardness decreases to a minimum value for the carbon content of 55mol% and then increases with a further increase in the carbon content of the target. The friction and wear tests carried out using a pin-on-disktype test machine showed that the friction coefficient of the films decreases from 0.14 in the case of using a target with a carbon content of 55mol% to 0.08 in the case of using a target with a carbon content of 67mol%, and that the wear resistance of the films increases with increasing carbon content of the target.
