Consistent Processing and Measurement Procedure on Micro Cutting

抄録

Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.