抄録
In the machine tool industry and the semiconductor manufacture fields, the necessity of high precision and fast response for NC machines is rapidly spreading. In general, it is well known that a positioning control system contains nonlinear friction force, it may cause a serious disadvantage on control performances such as tracking errors, limit cycles and undesired stick-slip motion at very low motion velocity. In order to achieve the high level control performance, the frictional effects have to be removed. In this paper, we proposed a novel PID control method which is based on the idea of sliding mode control for nonlinear friction compensation in a table drive system. Experimental results are given to show the effectiveness of our proposed PID control method compared with the conventional PID method. Especially, the tracking error of our proposed PID control was reduced by more than 2/3 compared to the case of the conventional PID control at the end of a stroke.
