抄録
The linear motor driving mechanism has been adopted as a positioning mechanism of machine tools to realize high speed and precise positioning due to the absence of friction and backlash. However, when two or more linear motors are used, minute differences between the thrust forces of each motor causes the generation of micro vibration and the change of velocity of each linear motor due to yawing around the center of gravity. This study proposes a virtual motor control method that uses three linear motors for the driving table to control the position of the center of gravity, bending and yawing independently.
