抄録
A fluorine surface coating using a simple dipping process was examined to improve the Q factor of diamond-like carbon (DLC) resonator fabricated by FIB-CVD using phenanthrene (C_<14>H_<10>) gas. As a result, a value of surface free energy of DLC surface was changed from 21.7 mJ/m^2 to 17.5 mJ/m^2. And, Q factor increased from 3877 to 6095. An increase in Q factor depended on the changes in the surface free energy. In addition to this, the surface coating effect on Q factor was depended on the surface area/volume ratio. These indicated that the hydrophobic film worked effectively for Q factor improvement.
