B005 A Long-Range Straightness Measurement with Motion Error Compensation

抄録

This paper presents a new method for measuring straightness with high accuracy and wide range. A proposed method is based on a simple principle; motion errors are detected with angle sensors, and these errors are directly used for compensating the measurement errors. In this study, straightness measurement experiments are carried out for evaluating the performance of the proposed method. In consequence, the measurement error of the surface profile is 0.63μm with a measuring length of 160mm. Therefore, the experimental results confirm that the method can measure various surfaces with high accuracy.