Analytical Investigation of Workpiece Attitude during Double-Sided Polishing

抄録

In this study, the attitude of a workpiece during double-sided polishing is investigated analytically. The attitude is calculated based on equilibrium of force and moment applied to the workpiece by sandwiching the workpiece between an upper pad and a lower pad. The analyzed results indicate that the workpiece tilts and the attitude varies in time during the process. The tilt of the workpiece leads to an inclined distribution of the polishing pressure. Moreover, the distribution is not uniform, though it is considered that the averaging by the workpiece rotation. Thus, it is confirmed that the attitude of the workpiece is an important parameter for practically and theoretically on the double-sided polishing process because it affects the uniformity of the polishing results.