抄録
In this paper, to realize micro fluid power sources applicable to microfactory or micromachines using fluid power, a resonantly-driven piezoelectric micropump with newly devised check valve unit is developed and the pumping characteristics are experimentally investigated. Furthermore, a practical application to micro press is attempted. First, micro sheet valve having the floating valve-body to increase valve-opening and to decrease pressure loss is proposed and fabricated by micromachining such as etching and micro-EDM (electrical discharge machining). The validity is verified through experiments on static characteristics between flow rates across the check valve and applied pressures. Second, frequency characteristics of the micropump that employs two micro sheet valves for inlet/outlet are experimentally investigated. Finally, a micro press equipped with the developed micropump is fabricated with he effective size of 20×20×28(mm)^3. Blanking of a hole with 0.3mm diameter to aluminum sheet with 0.01mm thickness is realized.
