年次大会
Online ISSN : 2424-2667
ISSN-L : 2424-2667
セッションID: J111036
会議情報
J111036 光散乱を利用したDLC膜のバルク欠陥検出法
櫻田 悠一高島 舞安原 鋭幸岩本 喜直松尾 誠大竹 尚登
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会議録・要旨集 フリー

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抄録
Diamond-like carbon (DLC) film has various micro-size defects like pinhole, void and particle. These defects cause a decrease in not only mechanical but also gas-barrier performances of DLC film. When DLC film is exposed to white light, light is scattered in all the direction at defects in DLC film. In this paper, bulk defects in DLC film that was deposited by plasma chemical vapor deposition (CVD) are detected by observing scattering light from defects under dark-field microscope. DLC film has wavelength dependence of transmittance. By applying this dependence to detecting method, we attempted to separate surface defects from inside defects of DLC films.
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