抄録
Using transfer printing, some metal thin-films have been formed in an array of fixed micro-beams as mechanical elements to have a thickness of less than 100 nm and a length of tens micro-meters. Due to differences in surface energy and area of contact, the thin-films are transferred from a micro-ridged stamp onto a micro-grooved SU-8 substrate. An increase of micro-roughness (Ra <100 nm) of the stamp allow a reduction of micro-crack generation in the transferred thin-films to improve the production yield of the fixed micro-beams, as the surface roughness of stamp are moderately adjusted by plasma treatment as well as its wettability. The quality of thin-film mainly depending on deposition method and condition also affects both form accuracy and production yield of fixed beam. Nano-scale finer grains of thin-film enhance its mechanical strength to provide flat micro-beams, although coarse thin-film causes several micro-meters of beam deflection owing to plastic deformations.
