抄録
Shape memory alloy is applied to an actuator as a functional material these days. Joule heat by electric current is usually used for this driving source, but this method depends on heating and cooling rate and has a limited capacity. This study is the deformation prediction by irradiating ultrasonic wave instead of Joule heat, because shape memory alloy has high vibration attenuation capacity. We investigated the natural mode and natural frequency shape memory alloy worked microfabrication by finite element method. As a result of analysis, to analyze deformed shape of shape memory alloy in bar by finite element method is effective method. Resonance of new mode of vibration is made by worked microfabrication in shape memory alloy. And Holed in shape memory alloy resonated only tip at high mode of vibration.
