P-MCH-01 Low-Insertion-Loss 8×8 Optical Matrix Switch using MEMS Analog-Control Mirror(Micro/Nanomechatronics,Technical Program of Poster Session)

Abstract

An optical matrix switch with low- insertion-loss, a flat package and flexible configuration of 18 input/output ports was developed. An array of two-axis electrostatic movable mirrors fabricated by MEMS technology was used to switch optical paths. The mean of measured insertion losses of all 64 paths in an 8×8 switch configuration was 1.1 dB; thus low insertion loss of the switch was confirmed. Loss increase caused by tilt angle drift of the mirrors was reduced to 1.1 dB by applying bias voltage.