Abstract
In this study, we fabricated high the micro-structures of aspect ratio made of silicon or thick photoresist SU-8 using the supercritical drying technology. Form the result of silicon micro-structure fabrication, it was confirmed that the micro-structures having the high aspect ratio of 1000 can be fabricated without sticking. Further, from hand the result of SU-8 micro-structure fabrication, it was confirmed that the residual of SU-8 in the channel was flowed to the openings due to the effect of supercritical drying.
