抄録
In this article, we report on the length and angle measurement methods using a regular crystalline lattice as the reference and a scanning tunneling microscope (STM) as a detector. (1) An absolute length measurement method with mm order range and sub-nm accuracy by combining a regular crystalline lattice and a laser interferometer is proposed, Optical fringe nλ(n : integer, λ : laser wavelength), which is determined with pm order accuracy by the interferometer, is used as a coarse scale. Lattice spacing on highly oriented pyrolytic graphite (HOPG) crystalline surface (∿0.25nm) is utilized as a fine scale. (2) A unit-angle measurement with nanoradian resolution by referring atomic structure (=crystalline axes) on crystalline surface is proposed. A design and operation method of a unit-angle measurement machine using the HOPG crystalline surface and the STM is discussed.
