フェムト秒レーザー励起を用いた表面ナノ加工に関する研究

抄録

Layer manufacturing technique such as stereolithography is powerful tool to fabricate the 3D shape based on 3D-CAD data. The resolution of the 3D fabrication is limited by the spot size in x and y axis when we use laser to deposit the material by using the laser. As for the resolution in z axis, it is decided by the layer thickness to deposit the material. In the stereolithography by using the laser beam, the material is usually transparent. Thus it is difficult to control the solidification size in z direction, which is the direction of the beam propagation. We suggest a laser surface processing technique is investigated to improve the height resolution of layer manufacturing. In this study, make a challenge to achieve the processing on the surface with processing depth, which is lower than the layer thickness.