Abstract
Three-dimensional micro carbon structure was fabricated using thermomechanical deformation technique with micro patterned photoresist film. We achieved micro carbon tube with curling process due to thermomechanical deformation. This process could contribute for fabrication of a carbon device using C-MEMS (carbon-microelectromechanical systems) approach. We also achieve this three dimensional carbon micro structure for scaffold of cell cultureing. Insect cell line AeAl-2 was cultured on the carbonized micro mesh tube. The cells were cultured in the 50 μm mesh on the tube. Biocompatibility of this carbon structure fabricated by our method was observed. With a use of a new method evaluated in this paper, it is possible to fabricate a carbon electrode that can be applied in various ways such as create a bio-device built in a human body.
